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| Home > Publications database > Substrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si(1-x)Gex films on silicon > print |
| Home > Publications database > Substrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si(1-x)Gex films on silicon > print |
| 001 | 40615 | ||
| 005 | 20240610115910.0 | ||
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| 100 | 1 | _ | |a Holländer, B. |0 P:(DE-Juel1)125595 |b 0 |u FZJ |
| 245 | _ | _ | |a Substrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si(1-x)Gex films on silicon |
| 260 | _ | _ | |c 2001 |
| 295 | 1 | 0 | |a Proceedings of 2000 International Conference on Ion Implantation Technology. - 2001. - 0-7803-6462-7. - S. 326 |
| 336 | 7 | _ | |a Contribution to a conference proceedings |0 PUB:(DE-HGF)8 |2 PUB:(DE-HGF) |
| 336 | 7 | _ | |a Contribution to a book |0 PUB:(DE-HGF)7 |2 PUB:(DE-HGF) |
| 336 | 7 | _ | |a Conference Paper |0 33 |2 EndNote |
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| 336 | 7 | _ | |a INPROCEEDINGS |2 BibTeX |
| 500 | _ | _ | |a Record converted from VDB: 12.11.2012 |
| 500 | _ | _ | |3 Conference proceedings / Book |
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| 700 | 1 | _ | |a Mantl, S. |0 P:(DE-Juel1)VDB4959 |b 2 |u FZJ |
| 700 | 1 | _ | |a Trinkaus, H. |0 P:(DE-Juel1)VDB3163 |b 3 |u FZJ |
| 700 | 1 | _ | |a Kirch, D. |0 P:(DE-Juel1)VDB4955 |b 4 |u FZJ |
| 700 | 1 | _ | |a Luysberg, M. |0 P:(DE-Juel1)130811 |b 5 |u FZJ |
| 700 | 1 | _ | |a Herzog, H.-J. |0 P:(DE-HGF)0 |b 6 |
| 700 | 1 | _ | |a Hackbarth, T. |0 P:(DE-HGF)0 |b 7 |
| 700 | 1 | _ | |a Fichtner, P. F. P. |0 P:(DE-HGF)0 |b 8 |
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| 914 | 1 | _ | |a Proceedings |y 2001 |
| 920 | 1 | _ | |k ISG-1 |l Institut für Halbleiterschichten und Bauelemente |d 31.12.2006 |g ISG |0 I:(DE-Juel1)VDB41 |x 0 |
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