%0 Conference Paper
%A Hogg, S. M.
%A Rije, E.
%A Moers, J.
%A Trellenkamp, S.
%A Bay, H. L.
%A Lenk, S.
%A Mantl, S.
%T Formation of shallow junctions in Si-nanostructures
%M PreJuSER-40879
%D 2001
%Z Record converted from VDB: 12.11.2012
%< Ion Beam Processing of Semiconductors Workshop
Y2 10 Sep 2001
M2 Erlangen, 
%F PUB:(DE-HGF)31
%9 Talk (non conference)
%U https://juser.fz-juelich.de/record/40879