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Talk (non conference) (Invited) PreJuSER-40879
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Formation of shallow junctions in Si-nanostructures

 ;  ;  ;  ;  ;  ;

2001

Ion Beam Processing of Semiconductors Workshop
Seminar, ErlangenErlangen, 10 Sep 20012001-09-10


Note: Record converted from VDB: 12.11.2012
Contributing Institute(s):
  1. Institut für Halbleiterschichten und Bauelemente (ISG-1)
Research Program(s):
  1. Ionentechnik (29.87.0)

Appears in the scientific report 2001
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Document types > Presentations > Talks (non-conference)
Institute Collections > PGI > PGI-9
Workflow collections > Public records
Publications database
 Record created 2012-11-13, last modified 2018-02-10
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