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@INPROCEEDINGS{Hogg:40879,
      author       = {Hogg, S. M. and Rije, E. and Moers, J. and Trellenkamp, S.
                      and Bay, H. L. and Lenk, S. and Mantl, S.},
      title        = {{F}ormation of shallow junctions in {S}i-nanostructures},
      reportid     = {PreJuSER-40879},
      year         = {2001},
      note         = {Record converted from VDB: 12.11.2012},
      comment      = {Ion Beam Processing of Semiconductors Workshop},
      booktitle     = {Ion Beam Processing of Semiconductors
                       Workshop},
      month         = {Sep},
      date          = {2001-09-10},
      organization  = {Erlangen, 10 Sep 2001},
      subtyp        = {Invited},
      cin          = {ISG-1},
      cid          = {I:(DE-Juel1)VDB41},
      pnm          = {Ionentechnik},
      pid          = {G:(DE-Juel1)FUEK67},
      typ          = {PUB:(DE-HGF)31},
      url          = {https://juser.fz-juelich.de/record/40879},
}