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@ARTICLE{Levichkova:40904,
author = {Levichkova, M. and Mankov, V. and Starbov, N. and
Karashanova, D. and Mednikarov, B. and Starbova, K.},
title = {{S}tructure and properties of nanosized electron beam
deposited zirconia thin films},
journal = {Surface and coatings technology},
volume = {141},
issn = {0257-8972},
address = {Amsterdam [u.a.]},
publisher = {Elsevier Science},
reportid = {PreJuSER-40904},
pages = {70},
year = {2001},
note = {Record converted from VDB: 12.11.2012},
abstract = {Thin films of amorphous zirconium oxide are deposited in
high vacuum via the electron gun evaporation of pure ZrO2
within a large scale of vapour incidence angles. A nanosized
grain surface structure and columnar growth morphology are
revealed by electron optical methods. It is demonstrated
that the oblique deposition results in both column
inclination and anisotropy of the column cross section that
are related to the vapour beam incidence. The revealed
structure is found to influence the Knoop microhardness, DC
conductivity and the effective refractive index by inducing
in-plane anisotropy, which is most pronounced at high vapour
incidence angles. The dependence of these properties on the
vapour incidence is explained with the nanodimensionality of
the film morphological features. Finally, it is shown how an
excimer laser processing modifies both the structure and
properties of the zirconia films. (C) 2001 Elsevier Science
B.V. All rights reserved.},
keywords = {J (WoSType)},
cin = {ISG-3},
ddc = {620},
cid = {I:(DE-Juel1)VDB43},
pnm = {Struktur und Dynamik von Grenzflächen},
pid = {G:(DE-Juel1)FUEK60},
shelfmark = {Materials Science, Coatings $\&$ Films / Physics, Applied},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000169277300010},
doi = {10.1016/S0257-8972(01)01162-8},
url = {https://juser.fz-juelich.de/record/40904},
}