Journal Article

PreJuSER-40904

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Structure and properties of nanosized electron beam deposited zirconia thin films

Levichkova, M. ; Mankov, V. ; Starbov, N.FZJ* ; Karashanova, D. ; Mednikarov, B. ; Starbova, K.FZJ*

2001
Elsevier Science Amsterdam [u.a.]

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Please use a persistent id in citations: doi:10.1016/S0257-8972(01)01162-8

Abstract: Thin films of amorphous zirconium oxide are deposited in high vacuum via the electron gun evaporation of pure ZrO2 within a large scale of vapour incidence angles. A nanosized grain surface structure and columnar growth morphology are revealed by electron optical methods. It is demonstrated that the oblique deposition results in both column inclination and anisotropy of the column cross section that are related to the vapour beam incidence. The revealed structure is found to influence the Knoop microhardness, DC conductivity and the effective refractive index by inducing in-plane anisotropy, which is most pronounced at high vapour incidence angles. The dependence of these properties on the vapour incidence is explained with the nanodimensionality of the film morphological features. Finally, it is shown how an excimer laser processing modifies both the structure and properties of the zirconia films. (C) 2001 Elsevier Science B.V. All rights reserved.

Keyword(s): J ; zirconia thin films (auto) ; oblique vacuum deposition (auto) ; nanosized structure and properties (auto) ; excimer laser modification (auto)

Note: Record converted from VDB: 12.11.2012

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Contributing Institute(s):

1. Institut für Grenzflächen und Vakuumtechnologien (ISG-3)

Research Program(s):

1. Struktur und Dynamik von Grenzflächen (29.25.0)

Appears in the scientific report 2001

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