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| 001 | 40904 | ||
| 005 | 20180210143303.0 | ||
| 024 | 7 | _ | |2 DOI |a 10.1016/S0257-8972(01)01162-8 |
| 024 | 7 | _ | |2 WOS |a WOS:000169277300010 |
| 037 | _ | _ | |a PreJuSER-40904 |
| 041 | _ | _ | |a eng |
| 082 | _ | _ | |a 620 |
| 084 | _ | _ | |2 WoS |a Materials Science, Coatings & Films |
| 084 | _ | _ | |2 WoS |a Physics, Applied |
| 100 | 1 | _ | |a Levichkova, M. |0 P:(DE-HGF)0 |b 0 |
| 245 | _ | _ | |a Structure and properties of nanosized electron beam deposited zirconia thin films |
| 260 | _ | _ | |a Amsterdam [u.a.] |b Elsevier Science |c 2001 |
| 300 | _ | _ | |a 70 |
| 336 | 7 | _ | |a Journal Article |0 PUB:(DE-HGF)16 |2 PUB:(DE-HGF) |
| 336 | 7 | _ | |a Output Types/Journal article |2 DataCite |
| 336 | 7 | _ | |a Journal Article |0 0 |2 EndNote |
| 336 | 7 | _ | |a ARTICLE |2 BibTeX |
| 336 | 7 | _ | |a JOURNAL_ARTICLE |2 ORCID |
| 336 | 7 | _ | |a article |2 DRIVER |
| 440 | _ | 0 | |a Surface and Coatings Technology |x 0257-8972 |0 5670 |v 141 |
| 500 | _ | _ | |a Record converted from VDB: 12.11.2012 |
| 520 | _ | _ | |a Thin films of amorphous zirconium oxide are deposited in high vacuum via the electron gun evaporation of pure ZrO2 within a large scale of vapour incidence angles. A nanosized grain surface structure and columnar growth morphology are revealed by electron optical methods. It is demonstrated that the oblique deposition results in both column inclination and anisotropy of the column cross section that are related to the vapour beam incidence. The revealed structure is found to influence the Knoop microhardness, DC conductivity and the effective refractive index by inducing in-plane anisotropy, which is most pronounced at high vapour incidence angles. The dependence of these properties on the vapour incidence is explained with the nanodimensionality of the film morphological features. Finally, it is shown how an excimer laser processing modifies both the structure and properties of the zirconia films. (C) 2001 Elsevier Science B.V. All rights reserved. |
| 536 | _ | _ | |a Struktur und Dynamik von Grenzflächen |c 29.25.0 |2 G:(DE-HGF) |0 G:(DE-Juel1)FUEK60 |x 0 |
| 588 | _ | _ | |a Dataset connected to Web of Science |
| 650 | _ | 7 | |a J |2 WoSType |
| 653 | 2 | 0 | |2 Author |a zirconia thin films |
| 653 | 2 | 0 | |2 Author |a oblique vacuum deposition |
| 653 | 2 | 0 | |2 Author |a nanosized structure and properties |
| 653 | 2 | 0 | |2 Author |a excimer laser modification |
| 700 | 1 | _ | |a Mankov, V. |0 P:(DE-HGF)0 |b 1 |
| 700 | 1 | _ | |a Starbov, N. |0 P:(DE-Juel1)VDB5992 |b 2 |u FZJ |
| 700 | 1 | _ | |a Karashanova, D. |0 P:(DE-HGF)0 |b 3 |
| 700 | 1 | _ | |a Mednikarov, B. |0 P:(DE-HGF)0 |b 4 |
| 700 | 1 | _ | |a Starbova, K. |0 P:(DE-Juel1)VDB5995 |b 5 |u FZJ |
| 773 | _ | _ | |a 10.1016/S0257-8972(01)01162-8 |g Vol. 141, p. 70 |p 70 |q 141<70 |0 PERI:(DE-600)1502240-7 |t Surface and coatings technology |v 141 |y 2001 |x 0257-8972 |
| 909 | C | O | |o oai:juser.fz-juelich.de:40904 |p VDB |
| 913 | 1 | _ | |k 29.25.0 |v Struktur und Dynamik von Grenzflächen |l Grenzflächen- und Vakuumforschung |b Struktur der Materie und Materialforschung |0 G:(DE-Juel1)FUEK60 |x 0 |
| 914 | 1 | _ | |y 2001 |
| 915 | _ | _ | |0 StatID:(DE-HGF)0010 |a JCR/ISI refereed |
| 920 | 1 | _ | |k ISG-3 |l Institut für Grenzflächen und Vakuumtechnologien |d 31.12.2006 |g ISG |0 I:(DE-Juel1)VDB43 |x 0 |
| 970 | _ | _ | |a VDB:(DE-Juel1)5576 |
| 980 | _ | _ | |a VDB |
| 980 | _ | _ | |a ConvertedRecord |
| 980 | _ | _ | |a journal |
| 980 | _ | _ | |a I:(DE-Juel1)PGI-3-20110106 |
| 980 | _ | _ | |a UNRESTRICTED |
| 981 | _ | _ | |a I:(DE-Juel1)PGI-3-20110106 |
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