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000040926 084__ $$2WoS$$aChemistry, Physical
000040926 084__ $$2WoS$$aMaterials Science, Coatings & Films
000040926 084__ $$2WoS$$aPhysics, Applied
000040926 084__ $$2WoS$$aPhysics, Condensed Matter
000040926 1001_ $$0P:(DE-Juel1)VDB5995$$aStarbova, K.$$b0$$uFZJ
000040926 245__ $$aPhase transitions in excimer laser irradiated zirconia thin films
000040926 260__ $$aAmsterdam$$bNorth-Holland$$c2001
000040926 300__ $$a177
000040926 3367_ $$0PUB:(DE-HGF)16$$2PUB:(DE-HGF)$$aJournal Article
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000040926 440_0 $$0573$$aApplied Surface Science$$v173$$x0169-4332
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000040926 520__ $$aIn the present work, excimer laser irradiation below the ablation threshold is successfully applied as a tool for surface modification of vapor grown amorphous zirconia (ZrO2) thin films. Characterization of virgin and laser processed areas was performed by optical spectroscopy, transmission electron microscopy (TEM), selected area electron diffraction (SAED), low angle X-ray diffraction (LAXRD) and reflection high energy electron diffraction (RHEED). The occurrence of phase transitions to orthorhombic or monoclinic modification of amorphous zirconia on laser parameters dependency is established. Separation of a new Zr phase is detected in parallel to the formation of crystalline zirconia phases. The observed structure transformations strikingly coincide with some polymorphic transitions in zirconia powders and sintered ceramics. The results obtained demonstrate the necessity for applying both surface and in-depth analytical techniques in characterizing excimer laser induced changes in thin ZrO2 films. (C) 2001 Elsevier Science B.V. All rights reserved.
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000040926 65320 $$2Author$$azirconia thin films
000040926 65320 $$2Author$$aexcimer laser modification
000040926 65320 $$2Author$$aphase transitions
000040926 65320 $$2Author$$atransmission electron microscopy
000040926 7001_ $$0P:(DE-HGF)0$$aMankov, V.$$b1
000040926 7001_ $$0P:(DE-Juel1)VDB5992$$aStarbov, N.$$b2$$uFZJ
000040926 7001_ $$0P:(DE-HGF)0$$aPopov, D.$$b3
000040926 7001_ $$0P:(DE-HGF)0$$aNihtianova, D.$$b4
000040926 7001_ $$0P:(DE-HGF)0$$aKolev, D.$$b5
000040926 7001_ $$0P:(DE-HGF)0$$aLaude, L. D.$$b6
000040926 773__ $$0PERI:(DE-600)2002520-8$$a10.1016/S0169-4332(00)00830-8$$gVol. 173, p. 177$$p177$$q173<177$$tApplied surface science$$v173$$x0169-4332$$y2001
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000040926 9141_ $$y2001
000040926 915__ $$0StatID:(DE-HGF)0010$$aJCR/ISI refereed
000040926 9201_ $$0I:(DE-Juel1)VDB43$$d31.12.2006$$gISG$$kISG-3$$lInstitut für Grenzflächen und Vakuumtechnologien$$x0
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