Journal Article

PreJuSER-40926

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Phase transitions in excimer laser irradiated zirconia thin films

Starbova, K.FZJ* ; Mankov, V. ; Starbov, N.FZJ* ; Popov, D. ; Nihtianova, D. ; Kolev, D. ; Laude, L. D.

2001
North-Holland Amsterdam

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Please use a persistent id in citations: doi:10.1016/S0169-4332(00)00830-8

Abstract: In the present work, excimer laser irradiation below the ablation threshold is successfully applied as a tool for surface modification of vapor grown amorphous zirconia (ZrO2) thin films. Characterization of virgin and laser processed areas was performed by optical spectroscopy, transmission electron microscopy (TEM), selected area electron diffraction (SAED), low angle X-ray diffraction (LAXRD) and reflection high energy electron diffraction (RHEED). The occurrence of phase transitions to orthorhombic or monoclinic modification of amorphous zirconia on laser parameters dependency is established. Separation of a new Zr phase is detected in parallel to the formation of crystalline zirconia phases. The observed structure transformations strikingly coincide with some polymorphic transitions in zirconia powders and sintered ceramics. The results obtained demonstrate the necessity for applying both surface and in-depth analytical techniques in characterizing excimer laser induced changes in thin ZrO2 films. (C) 2001 Elsevier Science B.V. All rights reserved.

Keyword(s): J ; zirconia thin films (auto) ; excimer laser modification (auto) ; phase transitions (auto) ; transmission electron microscopy (auto)

Note: Record converted from VDB: 12.11.2012

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Contributing Institute(s):

1. Institut für Grenzflächen und Vakuumtechnologien (ISG-3)

Research Program(s):

1. Struktur und Dynamik von Grenzflächen (29.25.0)

Appears in the scientific report 2001

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