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@ARTICLE{Starbova:40926,
author = {Starbova, K. and Mankov, V. and Starbov, N. and Popov, D.
and Nihtianova, D. and Kolev, D. and Laude, L. D.},
title = {{P}hase transitions in excimer laser irradiated zirconia
thin films},
journal = {Applied surface science},
volume = {173},
issn = {0169-4332},
address = {Amsterdam},
publisher = {North-Holland},
reportid = {PreJuSER-40926},
pages = {177},
year = {2001},
note = {Record converted from VDB: 12.11.2012},
abstract = {In the present work, excimer laser irradiation below the
ablation threshold is successfully applied as a tool for
surface modification of vapor grown amorphous zirconia
(ZrO2) thin films. Characterization of virgin and laser
processed areas was performed by optical spectroscopy,
transmission electron microscopy (TEM), selected area
electron diffraction (SAED), low angle X-ray diffraction
(LAXRD) and reflection high energy electron diffraction
(RHEED). The occurrence of phase transitions to orthorhombic
or monoclinic modification of amorphous zirconia on laser
parameters dependency is established. Separation of a new Zr
phase is detected in parallel to the formation of
crystalline zirconia phases. The observed structure
transformations strikingly coincide with some polymorphic
transitions in zirconia powders and sintered ceramics. The
results obtained demonstrate the necessity for applying both
surface and in-depth analytical techniques in characterizing
excimer laser induced changes in thin ZrO2 films. (C) 2001
Elsevier Science B.V. All rights reserved.},
keywords = {J (WoSType)},
cin = {ISG-3},
ddc = {670},
cid = {I:(DE-Juel1)VDB43},
pnm = {Struktur und Dynamik von Grenzflächen},
pid = {G:(DE-Juel1)FUEK60},
shelfmark = {Chemistry, Physical / Materials Science, Coatings $\&$
Films / Physics, Applied / Physics, Condensed Matter},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000167479800002},
doi = {10.1016/S0169-4332(00)00830-8},
url = {https://juser.fz-juelich.de/record/40926},
}