%0 Conference Paper
%A Lambertz, A.
%A Vetterl, O.
%A Finger, F.
%T High deposition rate for mc-Si:H absorber layers using VHF PECVD at elevated discharge power and deposition pressure
%M PreJuSER-41318
%D 2001
%Z Record converted from VDB: 12.11.2012
%< 17th  European Photovoltaic Solar Energy Conference and Exhibition
Y2 22 Oct 2001
M2 München, 
%F PUB:(DE-HGF)24
%9 Poster
%U https://juser.fz-juelich.de/record/41318