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High deposition rate for mc-Si:H absorber layers using VHF PECVD at elevated discharge power and deposition pressure

 ;  ;

2001

17th European Photovoltaic Solar Energy Conference and Exhibition
Seminar, MünchenMünchen, 22 Oct 20012001-10-22


Note: Record converted from VDB: 12.11.2012
Contributing Institute(s):
  1. Institut für Photovoltaik (IPV)
Research Program(s):
  1. Grundlagen und Technologie von Dünnschichtsolarzellen (30.90.0)

Appears in the scientific report 2001
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The record appears in these collections:
Document types > Presentations > Poster
Institute Collections > IMD > IMD-3
Workflow collections > Public records
IEK > IEK-5
Publications database
 Record created 2012-11-13, last modified 2024-07-08
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