TY  - CONF
AU  - Lambertz, A.
AU  - Vetterl, O.
AU  - Finger, F.
TI  - High deposition rate for mc-Si:H absorber layers using VHF PECVD at elevated discharge power and deposition pressure
M1  - PreJuSER-41318
PY  - 2001
N1  - Record converted from VDB: 12.11.2012
Y2  - 22 Oct 2001
M2  - München, 
LB  - PUB:(DE-HGF)24
UR  - https://juser.fz-juelich.de/record/41318
ER  -