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@INPROCEEDINGS{Lambertz:41318,
      author       = {Lambertz, A. and Vetterl, O. and Finger, F.},
      title        = {{H}igh deposition rate for mc-{S}i:{H} absorber layers
                      using {VHF} {PECVD} at elevated discharge power and
                      deposition pressure},
      reportid     = {PreJuSER-41318},
      year         = {2001},
      note         = {Record converted from VDB: 12.11.2012},
      comment      = {17th European Photovoltaic Solar Energy Conference and
                      Exhibition},
      booktitle     = {17th European Photovoltaic Solar
                       Energy Conference and Exhibition},
      month         = {Oct},
      date          = {2001-10-22},
      organization  = {München, 22 Oct 2001},
      cin          = {IPV},
      cid          = {I:(DE-Juel1)VDB46},
      pnm          = {Grundlagen und Technologie von Dünnschichtsolarzellen},
      pid          = {G:(DE-Juel1)FUEK70},
      typ          = {PUB:(DE-HGF)24},
      url          = {https://juser.fz-juelich.de/record/41318},
}