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@ARTICLE{Klein:44136,
      author       = {Klein, S. and Finger, F. and Carius, R. and Wagner, H. and
                      Stutzmann, M.},
      title        = {{I}ntrinsic amorphous and microcrystalline silicon by
                      hot-wire-deposition for thin film solar cell applications},
      journal      = {Thin solid films},
      volume       = {395},
      issn         = {0040-6090},
      address      = {Amsterdam [u.a.]},
      publisher    = {Elsevier},
      reportid     = {PreJuSER-44136},
      pages        = {305 - 309},
      year         = {2001},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {The influence of various deposition parameters on the
                      electrical and optical properties and the structure of
                      amorphous and microcrystalline silicon films was
                      investigated for material prepared by hot-wire (HW) CVD in a
                      new multichamber deposition system, designed for the
                      development of thin film solar cells. Prior to the material
                      studies, careful measurement of the real substrate
                      temperature under the influence of additional HW heating was
                      performed. While good electronic quality and solar cell
                      performance was found for a-Si:H layers, the Lc-Si:H
                      material showed very high spin densities, porosity and a
                      characteristic structural inhomogeneity along the growth
                      axis. (C) 2001 Elsevier Science B.V. All rights reserved.},
      keywords     = {J (WoSType)},
      cin          = {IPV / S / S},
      ddc          = {070},
      cid          = {I:(DE-Juel1)VDB46 / I:(DE-Juel1)VDB224 /
                      I:(DE-Juel1)VDB224},
      pnm          = {Grundlagen und Technologie von Dünnschichtsolarzellen},
      pid          = {G:(DE-Juel1)FUEK70},
      shelfmark    = {Materials Science, Multidisciplinary / Materials Science,
                      Coatings $\&$ Films / Physics, Applied / Physics, Condensed
                      Matter},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000171625000064},
      doi          = {10.1016/S0040-6090(01)01280-9},
      url          = {https://juser.fz-juelich.de/record/44136},
}