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001     44136
005     20240708133703.0
024 7 _ |2 DOI
|a 10.1016/S0040-6090(01)01280-9
024 7 _ |2 WOS
|a WOS:000171625000064
037 _ _ |a PreJuSER-44136
041 _ _ |a eng
082 _ _ |a 070
084 _ _ |2 WoS
|a Materials Science, Multidisciplinary
084 _ _ |2 WoS
|a Materials Science, Coatings & Films
084 _ _ |2 WoS
|a Physics, Applied
084 _ _ |2 WoS
|a Physics, Condensed Matter
100 1 _ |a Klein, S.
|0 P:(DE-Juel1)VDB5924
|b 0
|u FZJ
245 _ _ |a Intrinsic amorphous and microcrystalline silicon by hot-wire-deposition for thin film solar cell applications
260 _ _ |a Amsterdam [u.a.]
|b Elsevier
|c 2001
300 _ _ |a 305 - 309
336 7 _ |a Journal Article
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440 _ 0 |a Thin Solid Films
|x 0040-6090
|0 5762
|v 395
500 _ _ |a Record converted from VDB: 12.11.2012
520 _ _ |a The influence of various deposition parameters on the electrical and optical properties and the structure of amorphous and microcrystalline silicon films was investigated for material prepared by hot-wire (HW) CVD in a new multichamber deposition system, designed for the development of thin film solar cells. Prior to the material studies, careful measurement of the real substrate temperature under the influence of additional HW heating was performed. While good electronic quality and solar cell performance was found for a-Si:H layers, the Lc-Si:H material showed very high spin densities, porosity and a characteristic structural inhomogeneity along the growth axis. (C) 2001 Elsevier Science B.V. All rights reserved.
536 _ _ |a Grundlagen und Technologie von Dünnschichtsolarzellen
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588 _ _ |a Dataset connected to Web of Science
650 _ 7 |a J
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653 2 0 |2 Author
|a hot-wire CVD
653 2 0 |2 Author
|a structural properties
653 2 0 |2 Author
|a solar cells
653 2 0 |2 Author
|a silicon
700 1 _ |a Finger, F.
|0 P:(DE-Juel1)130238
|b 1
|u FZJ
700 1 _ |a Carius, R.
|0 P:(DE-Juel1)VDB4964
|b 2
|u FZJ
700 1 _ |a Wagner, H.
|0 P:(DE-Juel1)VDB5911
|b 3
|u FZJ
700 1 _ |a Stutzmann, M.
|0 P:(DE-Juel1)VDB5925
|b 4
|u FZJ
773 _ _ |a 10.1016/S0040-6090(01)01280-9
|g Vol. 395, p. 305 - 309
|p 305 - 309
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|0 PERI:(DE-600)1482896-0
|t Thin solid films
|v 395
|y 2001
|x 0040-6090
909 C O |o oai:juser.fz-juelich.de:44136
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913 1 _ |k 30.90.0
|v Grundlagen und Technologie von Dünnschichtsolarzellen
|l Energieumwandlungstechniken
|b Energietechnik
|0 G:(DE-Juel1)FUEK70
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914 1 _ |y 2001
915 _ _ |0 StatID:(DE-HGF)0010
|a JCR/ISI refereed
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|l Institut für Photovoltaik
|d 31.12.2006
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