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@ARTICLE{Dahmen:47376,
      author       = {Dahmen, K. and Giesen, M. and Ikonomov, K. and Ibach, H.
                      and Starbova, K.},
      title        = {{S}teady-state surface stress induced in nobel gas
                      sputtering},
      journal      = {Thin solid films},
      volume       = {428},
      issn         = {0040-6090},
      address      = {Amsterdam [u.a.]},
      publisher    = {Elsevier},
      reportid     = {PreJuSER-47376},
      pages        = {6 - 10},
      year         = {2003},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {We have measured the surface stress on single crystal
                      Cu(100) surfaces as induced by bombardment of the surface
                      with the noble gas ions Ar, Ne and He at room temperature.
                      Regardless of the ion type and energy, the induced stress is
                      compressive and saturates as a function of sputter time at a
                      value between 2 and 15 N/m. Saturation time and magnitude of
                      the induced stress depend on the ion species and their
                      energy. The time dependence can be accounted for by assuming
                      a steady state thickness of a defective surface layer, which
                      arises from a balance between sputtering and ion
                      implantation. (C) 2002 Elsevier Science B.V. All rights
                      reserved.},
      keywords     = {J (WoSType)},
      cin          = {ISG-3 / ISG-4},
      ddc          = {070},
      cid          = {I:(DE-Juel1)VDB43 / I:(DE-Juel1)VDB44},
      pnm          = {Kondensierte Materie},
      pid          = {G:(DE-Juel1)FUEK242},
      shelfmark    = {Materials Science, Multidisciplinary / Materials Science,
                      Coatings $\&$ Films / Physics, Applied / Physics, Condensed
                      Matter},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000182500500003},
      doi          = {10.1016/S0040-6090(02)01182-3},
      url          = {https://juser.fz-juelich.de/record/47376},
}