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| Home > Publications database > Steady-state surface stress induced in nobel gas sputtering > print |
| 001 | 47376 | ||
| 005 | 20200402210008.0 | ||
| 024 | 7 | _ | |2 DOI |a 10.1016/S0040-6090(02)01182-3 |
| 024 | 7 | _ | |2 WOS |a WOS:000182500500003 |
| 037 | _ | _ | |a PreJuSER-47376 |
| 041 | _ | _ | |a eng |
| 082 | _ | _ | |a 070 |
| 084 | _ | _ | |2 WoS |a Materials Science, Multidisciplinary |
| 084 | _ | _ | |2 WoS |a Materials Science, Coatings & Films |
| 084 | _ | _ | |2 WoS |a Physics, Applied |
| 084 | _ | _ | |2 WoS |a Physics, Condensed Matter |
| 100 | 1 | _ | |a Dahmen, K. |b 0 |u FZJ |0 P:(DE-Juel1)VDB5680 |
| 245 | _ | _ | |a Steady-state surface stress induced in nobel gas sputtering |
| 260 | _ | _ | |a Amsterdam [u.a.] |b Elsevier |c 2003 |
| 300 | _ | _ | |a 6 - 10 |
| 336 | 7 | _ | |a Journal Article |0 PUB:(DE-HGF)16 |2 PUB:(DE-HGF) |
| 336 | 7 | _ | |a Output Types/Journal article |2 DataCite |
| 336 | 7 | _ | |a Journal Article |0 0 |2 EndNote |
| 336 | 7 | _ | |a ARTICLE |2 BibTeX |
| 336 | 7 | _ | |a JOURNAL_ARTICLE |2 ORCID |
| 336 | 7 | _ | |a article |2 DRIVER |
| 440 | _ | 0 | |a Thin Solid Films |x 0040-6090 |0 5762 |v 428 |
| 500 | _ | _ | |a Record converted from VDB: 12.11.2012 |
| 520 | _ | _ | |a We have measured the surface stress on single crystal Cu(100) surfaces as induced by bombardment of the surface with the noble gas ions Ar, Ne and He at room temperature. Regardless of the ion type and energy, the induced stress is compressive and saturates as a function of sputter time at a value between 2 and 15 N/m. Saturation time and magnitude of the induced stress depend on the ion species and their energy. The time dependence can be accounted for by assuming a steady state thickness of a defective surface layer, which arises from a balance between sputtering and ion implantation. (C) 2002 Elsevier Science B.V. All rights reserved. |
| 536 | _ | _ | |a Kondensierte Materie |c M02 |2 G:(DE-HGF) |0 G:(DE-Juel1)FUEK242 |x 0 |
| 588 | _ | _ | |a Dataset connected to Web of Science |
| 650 | _ | 7 | |a J |2 WoSType |
| 653 | 2 | 0 | |2 Author |a atom solid interaction |
| 653 | 2 | 0 | |2 Author |a sputtering |
| 653 | 2 | 0 | |2 Author |a surface stress |
| 653 | 2 | 0 | |2 Author |a radiation damage |
| 653 | 2 | 0 | |2 Author |a copper |
| 653 | 2 | 0 | |2 Author |a single crystal surfaces |
| 700 | 1 | _ | |a Giesen, M. |b 1 |u FZJ |0 P:(DE-Juel1)4744 |
| 700 | 1 | _ | |a Ikonomov, K. |b 2 |u FZJ |0 P:(DE-Juel1)VDB7599 |
| 700 | 1 | _ | |a Ibach, H. |b 3 |u FZJ |0 P:(DE-Juel1)VDB5414 |
| 700 | 1 | _ | |a Starbova, K. |b 4 |u FZJ |0 P:(DE-Juel1)VDB5995 |
| 773 | _ | _ | |a 10.1016/S0040-6090(02)01182-3 |g Vol. 428, p. 6 - 10 |p 6 - 10 |q 428<6 - 10 |0 PERI:(DE-600)1482896-0 |t Thin solid films |v 428 |y 2003 |x 0040-6090 |
| 856 | 7 | _ | |u http://dx.doi.org/10.1016/S0040-6090(02)01182-3 |
| 909 | C | O | |o oai:juser.fz-juelich.de:47376 |p VDB |
| 913 | 1 | _ | |k M02 |v Kondensierte Materie |l Kondensierte Materie |b Materie |0 G:(DE-Juel1)FUEK242 |x 0 |
| 914 | 1 | _ | |y 2003 |
| 915 | _ | _ | |0 StatID:(DE-HGF)0010 |a JCR/ISI refereed |
| 920 | 1 | _ | |k ISG-3 |l Institut für Grenzflächen und Vakuumtechnologien |d 31.12.2006 |g ISG |0 I:(DE-Juel1)VDB43 |x 0 |
| 920 | 1 | _ | |k ISG-4 |l Institut für biologisch-anorganische Grenzflächen |d 31.12.2001 |g ISG |0 I:(DE-Juel1)VDB44 |x 1 |
| 970 | _ | _ | |a VDB:(DE-Juel1)7473 |
| 980 | _ | _ | |a VDB |
| 980 | _ | _ | |a ConvertedRecord |
| 980 | _ | _ | |a journal |
| 980 | _ | _ | |a I:(DE-Juel1)PGI-3-20110106 |
| 980 | _ | _ | |a I:(DE-Juel1)ICS-7-20110106 |
| 980 | _ | _ | |a UNRESTRICTED |
| 981 | _ | _ | |a I:(DE-Juel1)IBI-2-20200312 |
| 981 | _ | _ | |a I:(DE-Juel1)PGI-3-20110106 |
| 981 | _ | _ | |a I:(DE-Juel1)ICS-7-20110106 |
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