%0 Journal Article
%A Reichenberg, B.
%A Tiedke, S.
%A Peter, F.
%A Waser, R.
%A Tappe, S.
%A Schneller, T.
%T Contact mode potentiometric measurements with an atomic force microscope on high resistive perovskite thin films
%J Journal of the European Ceramic Society
%V 25
%@ 0955-2219
%C Amsterdam [u.a.]
%I Elsevier Science
%M PreJuSER-47460
%P 2353
%D 2005
%Z Record converted from VDB: 12.11.2012
%X We have investigated the potential distribution on barium titanate thin filius with ail atomic force microscope in contact mode to find answers to the important question of local electric conductivity. A detailed knowledge about the electrical transport mechanisms is very important to receive a sound operation for highly integrated circuits such as non-volatile memory cells. With this paper we present an advanced method to perform these potential scans in galvanic contact. Key element of the set-up is an optimized electrometer amplifier which has an electronically reduced input capacitance avoiding the work function influence on the surface potential scan. To demonstrate the capability of our set-up we present example measurements performed on thermally reduced BaTiO3 thin films. (c) 2005 Elsevier Ltd. All rights reserved.
%K J (WoSType)
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000230569300079
%R 10.1016/j.jeurceramsoc.2005.03.195
%U https://juser.fz-juelich.de/record/47460