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000047460 0247_ $$2DOI$$a10.1016/j.jeurceramsoc.2005.03.195
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000047460 084__ $$2WoS$$aMaterials Science, Ceramics
000047460 1001_ $$0P:(DE-HGF)0$$aReichenberg, B.$$b0
000047460 245__ $$aContact mode potentiometric measurements with an atomic force microscope on high resistive perovskite thin films
000047460 260__ $$aAmsterdam [u.a.]$$bElsevier Science$$c2005
000047460 300__ $$a2353
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000047460 440_0 $$03891$$aJournal of the European Ceramic Society$$v25$$x0955-2219$$y12
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000047460 520__ $$aWe have investigated the potential distribution on barium titanate thin filius with ail atomic force microscope in contact mode to find answers to the important question of local electric conductivity. A detailed knowledge about the electrical transport mechanisms is very important to receive a sound operation for highly integrated circuits such as non-volatile memory cells. With this paper we present an advanced method to perform these potential scans in galvanic contact. Key element of the set-up is an optimized electrometer amplifier which has an electronically reduced input capacitance avoiding the work function influence on the surface potential scan. To demonstrate the capability of our set-up we present example measurements performed on thermally reduced BaTiO3 thin films. (c) 2005 Elsevier Ltd. All rights reserved.
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000047460 65320 $$2Author$$aelectrical properties
000047460 65320 $$2Author$$aatomic force microscope
000047460 65320 $$2Author$$adefects
000047460 65320 $$2Author$$asurfaces
000047460 7001_ $$0P:(DE-HGF)0$$aTiedke, S.$$b1
000047460 7001_ $$0P:(DE-Juel1)VDB42216$$aPeter, F.$$b2$$uFZJ
000047460 7001_ $$0P:(DE-Juel1)131022$$aWaser, R.$$b3$$uFZJ
000047460 7001_ $$0P:(DE-HGF)0$$aTappe, S.$$b4
000047460 7001_ $$0P:(DE-HGF)0$$aSchneller, T.$$b5
000047460 773__ $$0PERI:(DE-600)2013983-4$$a10.1016/j.jeurceramsoc.2005.03.195$$gVol. 25, p. 2353$$p2353$$q25<2353$$tJournal of the European Ceramic Society$$v25$$x0955-2219$$y2005
000047460 8567_ $$uhttp://dx.doi.org/10.1016/j.jeurceramsoc.2005.03.195
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000047460 9141_ $$y2005
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000047460 9201_ $$0I:(DE-Juel1)VDB321$$d31.12.2006$$gIFF$$kIFF-IEM$$lElektronische Materialien$$x0
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