TY - JOUR
AU - Reichenberg, B.
AU - Tiedke, S.
AU - Peter, F.
AU - Waser, R.
AU - Tappe, S.
AU - Schneller, T.
TI - Contact mode potentiometric measurements with an atomic force microscope on high resistive perovskite thin films
JO - Journal of the European Ceramic Society
VL - 25
SN - 0955-2219
CY - Amsterdam [u.a.]
PB - Elsevier Science
M1 - PreJuSER-47460
SP - 2353
PY - 2005
N1 - Record converted from VDB: 12.11.2012
AB - We have investigated the potential distribution on barium titanate thin filius with ail atomic force microscope in contact mode to find answers to the important question of local electric conductivity. A detailed knowledge about the electrical transport mechanisms is very important to receive a sound operation for highly integrated circuits such as non-volatile memory cells. With this paper we present an advanced method to perform these potential scans in galvanic contact. Key element of the set-up is an optimized electrometer amplifier which has an electronically reduced input capacitance avoiding the work function influence on the surface potential scan. To demonstrate the capability of our set-up we present example measurements performed on thermally reduced BaTiO3 thin films. (c) 2005 Elsevier Ltd. All rights reserved.
KW - J (WoSType)
LB - PUB:(DE-HGF)16
UR - <Go to ISI:>//WOS:000230569300079
DO - DOI:10.1016/j.jeurceramsoc.2005.03.195
UR - https://juser.fz-juelich.de/record/47460
ER -