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000048878 0247_ $$2DOI$$a10.1063/1.2084322
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000048878 084__ $$2WoS$$aPhysics, Applied
000048878 1001_ $$0P:(DE-HGF)0$$aClemens, S.$$b0
000048878 245__ $$aIntegration of ferroelectric lead titanate nanoislands for direct hysteresis measurements
000048878 260__ $$aMelville, NY$$bAmerican Institute of Physics$$c2005
000048878 300__ $$a142904
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000048878 440_0 $$0562$$aApplied Physics Letters$$v87$$x0003-6951
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000048878 520__ $$aWe report on the integration of fully functional ferroelectric PbTiO3 nanostructures of typically less than 100 nm lateral extension into a low-k dielectric hydrogen silsesquioxane film. Chemical mechanical polishing of the dielectric layer down to an overall thickness below the nanoparticles height exposes the structures. After confirmation of the piezoelectricity of individual embedded grains, gold electrode pads are deposited to characterize several of these grains in parallel. Evidence of ferroelectric switching is observed and discussed within an equivalent circuit model. This paves the way to a better integration and statistical analysis of ferroelectric nanostructures. (C) 2005 American Institute of Physics.
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000048878 7001_ $$0P:(DE-HGF)0$$aSchneller, T.$$b1
000048878 7001_ $$0P:(DE-Juel1)131022$$aWaser, R.$$b2$$uFZJ
000048878 7001_ $$0P:(DE-Juel1)VDB26957$$aRüdiger, A.$$b3$$uFZJ
000048878 7001_ $$0P:(DE-Juel1)VDB42216$$aPeter, F.$$b4$$uFZJ
000048878 7001_ $$0P:(DE-Juel1)VDB34541$$aKronholz, S.$$b5$$uFZJ
000048878 7001_ $$0P:(DE-HGF)0$$aSchmitz, T.$$b6
000048878 7001_ $$0P:(DE-HGF)0$$aTiedke, T.$$b7
000048878 773__ $$0PERI:(DE-600)1469436-0$$a10.1063/1.2084322$$gVol. 87, p. 142904$$p142904$$q87<142904$$tApplied physics letters$$v87$$x0003-6951$$y2005
000048878 8567_ $$uhttp://hdl.handle.net/2128/1012$$uhttp://dx.doi.org/10.1063/1.2084322
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