Journal Article

PreJuSER-48878

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Integration of ferroelectric lead titanate nanoislands for direct hysteresis measurements

Clemens, S. ; Schneller, T. ; Waser, R.FZJ* ; Rüdiger, A.FZJ* ; Peter, F.FZJ* ; Kronholz, S.FZJ* ; Schmitz, T. ; Tiedke, T.

2005
American Institute of Physics Melville, NY

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Please use a persistent id in citations: http://hdl.handle.net/2128/1012  doi:10.1063/1.2084322

Abstract: We report on the integration of fully functional ferroelectric PbTiO3 nanostructures of typically less than 100 nm lateral extension into a low-k dielectric hydrogen silsesquioxane film. Chemical mechanical polishing of the dielectric layer down to an overall thickness below the nanoparticles height exposes the structures. After confirmation of the piezoelectricity of individual embedded grains, gold electrode pads are deposited to characterize several of these grains in parallel. Evidence of ferroelectric switching is observed and discussed within an equivalent circuit model. This paves the way to a better integration and statistical analysis of ferroelectric nanostructures. (C) 2005 American Institute of Physics.

Keyword(s): J

Note: Record converted from VDB: 12.11.2012

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Contributing Institute(s):

1. Elektronische Materialien (IFF-IEM)
2. Center of Nanoelectronic Systems for Information Technology (CNI)

Research Program(s):

1. Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik (I01)

Appears in the scientific report 2005
Notes: This version is available at the following Publisher URL: http://apl.aip.org

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