TY  - JOUR
AU  - Clemens, S.
AU  - Schneller, T.
AU  - Waser, R.
AU  - Rüdiger, A.
AU  - Peter, F.
AU  - Kronholz, S.
AU  - Schmitz, T.
AU  - Tiedke, T.
TI  - Integration of ferroelectric lead titanate nanoislands for direct hysteresis measurements
JO  - Applied physics letters
VL  - 87
SN  - 0003-6951
CY  - Melville, NY
PB  - American Institute of Physics
M1  - PreJuSER-48878
SP  - 142904
PY  - 2005
N1  - Record converted from VDB: 12.11.2012
AB  - We report on the integration of fully functional ferroelectric PbTiO3 nanostructures of typically less than 100 nm lateral extension into a low-k dielectric hydrogen silsesquioxane film. Chemical mechanical polishing of the dielectric layer down to an overall thickness below the nanoparticles height exposes the structures. After confirmation of the piezoelectricity of individual embedded grains, gold electrode pads are deposited to characterize several of these grains in parallel. Evidence of ferroelectric switching is observed and discussed within an equivalent circuit model. This paves the way to a better integration and statistical analysis of ferroelectric nanostructures. (C) 2005 American Institute of Physics.
KW  - J (WoSType)
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000232225700047
DO  - DOI:10.1063/1.2084322
UR  - https://juser.fz-juelich.de/record/48878
ER  -