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@ARTICLE{Clemens:48878,
      author       = {Clemens, S. and Schneller, T. and Waser, R. and Rüdiger,
                      A. and Peter, F. and Kronholz, S. and Schmitz, T. and
                      Tiedke, T.},
      title        = {{I}ntegration of ferroelectric lead titanate nanoislands
                      for direct hysteresis measurements},
      journal      = {Applied physics letters},
      volume       = {87},
      issn         = {0003-6951},
      address      = {Melville, NY},
      publisher    = {American Institute of Physics},
      reportid     = {PreJuSER-48878},
      pages        = {142904},
      year         = {2005},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {We report on the integration of fully functional
                      ferroelectric PbTiO3 nanostructures of typically less than
                      100 nm lateral extension into a low-k dielectric hydrogen
                      silsesquioxane film. Chemical mechanical polishing of the
                      dielectric layer down to an overall thickness below the
                      nanoparticles height exposes the structures. After
                      confirmation of the piezoelectricity of individual embedded
                      grains, gold electrode pads are deposited to characterize
                      several of these grains in parallel. Evidence of
                      ferroelectric switching is observed and discussed within an
                      equivalent circuit model. This paves the way to a better
                      integration and statistical analysis of ferroelectric
                      nanostructures. (C) 2005 American Institute of Physics.},
      keywords     = {J (WoSType)},
      cin          = {IFF-IEM / CNI},
      ddc          = {530},
      cid          = {I:(DE-Juel1)VDB321 / I:(DE-Juel1)VDB381},
      pnm          = {Materialien, Prozesse und Bauelemente für die Mikro- und
                      Nanoelektronik},
      pid          = {G:(DE-Juel1)FUEK252},
      shelfmark    = {Physics, Applied},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000232225700047},
      doi          = {10.1063/1.2084322},
      url          = {https://juser.fz-juelich.de/record/48878},
}