Hauptseite > Publikationsdatenbank > Integration of ferroelectric lead titanate nanoislands for direct hysteresis measurements > print

001     48878
005     20200423204254.0
017 _ _ |a This version is available at the following Publisher URL: http://apl.aip.org
024 7 _ |a 10.1063/1.2084322
|2 DOI
024 7 _ |a WOS:000232225700047
|2 WOS
024 7 _ |a 2128/1012
|2 Handle
037 _ _ |a PreJuSER-48878
041 _ _ |a eng
082 _ _ |a 530
084 _ _ |2 WoS
|a Physics, Applied
100 1 _ |a Clemens, S.
|b 0
|0 P:(DE-HGF)0
245 _ _ |a Integration of ferroelectric lead titanate nanoislands for direct hysteresis measurements
260 _ _ |a Melville, NY
|b American Institute of Physics
|c 2005
300 _ _ |a 142904
336 7 _ |a Journal Article
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336 7 _ |a Journal Article
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336 7 _ |a ARTICLE
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336 7 _ |a JOURNAL_ARTICLE
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336 7 _ |a article
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440 _ 0 |a Applied Physics Letters
|x 0003-6951
|0 562
|v 87
500 _ _ |a Record converted from VDB: 12.11.2012
520 _ _ |a We report on the integration of fully functional ferroelectric PbTiO3 nanostructures of typically less than 100 nm lateral extension into a low-k dielectric hydrogen silsesquioxane film. Chemical mechanical polishing of the dielectric layer down to an overall thickness below the nanoparticles height exposes the structures. After confirmation of the piezoelectricity of individual embedded grains, gold electrode pads are deposited to characterize several of these grains in parallel. Evidence of ferroelectric switching is observed and discussed within an equivalent circuit model. This paves the way to a better integration and statistical analysis of ferroelectric nanostructures. (C) 2005 American Institute of Physics.
536 _ _ |a Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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700 1 _ |a Schneller, T.
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700 1 _ |a Waser, R.
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700 1 _ |a Rüdiger, A.
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700 1 _ |a Peter, F.
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700 1 _ |a Kronholz, S.
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700 1 _ |a Schmitz, T.
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700 1 _ |a Tiedke, T.
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773 _ _ |a 10.1063/1.2084322
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856 7 _ |u http://dx.doi.org/10.1063/1.2084322
|u http://hdl.handle.net/2128/1012
856 4 _ |u https://juser.fz-juelich.de/record/48878/files/76711.pdf
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