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@ARTICLE{Thomas:49718,
      author       = {Thomas, R. and Regnery, S. and Ehrhart, P. and Waser, R.
                      and Patil, U. and Bhakta, R. and Devi, A.},
      title        = {{H}igh-k dielectric materials by metalorganic chemical
                      vapor deposition: growth and characterization},
      journal      = {Ferroelectrics},
      volume       = {327},
      issn         = {0015-0193},
      address      = {London [u.a.]},
      publisher    = {Taylor $\&$ Francis},
      reportid     = {PreJuSER-49718},
      pages        = {111},
      year         = {2005},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {Two novel mononuclear mixed alkoxide compounds of Ti and
                      Zr, [Ti(OPri)(2) (tbaoac)(2)] and [Zr(OPri)(2) (tbaoac)(2)],
                      were synthesised and characterised. These complexes are
                      highly soluble and possess superior thermal properties
                      showing promising characteristics as precursors for MOCVD of
                      oxide thin films. Results are presented for thin films,
                      which were deposited in a liquid injection metal-organic
                      chemical vapour deposition production tool. Special emphasis
                      is given to the properties of ZrO2 thin films within MIS
                      structures as proposed for gate oxide applications and to
                      the compatibility of the new Ti precursor with a standard
                      Sr(thd)(2) precursor for low temperature deposition of
                      SrTiO3.},
      keywords     = {J (WoSType)},
      cin          = {IFF-IEM / CNI},
      ddc          = {530},
      cid          = {I:(DE-Juel1)VDB321 / I:(DE-Juel1)VDB381},
      pnm          = {Materialien, Prozesse und Bauelemente für die Mikro- und
                      Nanoelektronik},
      pid          = {G:(DE-Juel1)FUEK252},
      shelfmark    = {Materials Science, Multidisciplinary / Physics, Condensed
                      Matter},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000234250400017},
      doi          = {10.1080/00150190500316531},
      url          = {https://juser.fz-juelich.de/record/49718},
}