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000050084 1001_ $$0P:(DE-HGF)0$$aMilanov, A.$$b0
000050084 245__ $$aMixed amide-malonate compound of hafnium as a novel monomeric precursor for MOCVD of HfO2 thin films
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000050084 520__ $$aThe concept of introducing malonates as chelating ligands in combination with metal amides has yielded a new class of compounds which enable growth Of HfO2 thin films at low deposition temperatures by liquid injection metalorganic chemical vapour deposition.
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