%0 Conference Paper
%A Klein, S.
%A Houben, L.
%A Carius, R.
%A Finger, F.
%A Fischer, E. V.
%T Structural properties of microcrystalline SiC deposited at low substrate temperatures by HWCVD
%M PreJuSER-50526
%D 2005
%Z Record converted from VDB: 12.11.2012
%< 21st International Conference on Amorphous and Nanocrystalline Semiconductors (ICANS21)
Y2 4 Sep 2005
M2 Lisboa, 
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/50526