TY  - CONF
AU  - Klein, S.
AU  - Houben, L.
AU  - Carius, R.
AU  - Finger, F.
AU  - Fischer, E. V.
TI  - Structural properties of microcrystalline SiC deposited at low substrate temperatures by HWCVD
M1  - PreJuSER-50526
PY  - 2005
N1  - Record converted from VDB: 12.11.2012
Y2  - 4 Sep 2005
M2  - Lisboa, 
LB  - PUB:(DE-HGF)6
UR  - https://juser.fz-juelich.de/record/50526
ER  -