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@INPROCEEDINGS{Klein:50526,
      author       = {Klein, S. and Houben, L. and Carius, R. and Finger, F. and
                      Fischer, E. V.},
      title        = {{S}tructural properties of microcrystalline {S}i{C}
                      deposited at low substrate temperatures by {HWCVD}},
      reportid     = {PreJuSER-50526},
      year         = {2005},
      note         = {Record converted from VDB: 12.11.2012},
      comment      = {21st International Conference on Amorphous and
                      Nanocrystalline Semiconductors (ICANS21)},
      booktitle     = {21st International Conference on
                       Amorphous and Nanocrystalline
                       Semiconductors (ICANS21)},
      month         = {Sep},
      date          = {2005-09-04},
      organization  = {Lisboa, 4 Sep 2005},
      cin          = {IPV / IWV-1},
      cid          = {I:(DE-Juel1)VDB46 / I:(DE-Juel1)VDB5},
      pnm          = {Photovoltaik},
      pid          = {G:(DE-Juel1)FUEK247},
      typ          = {PUB:(DE-HGF)6},
      url          = {https://juser.fz-juelich.de/record/50526},
}