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001     50526
005     20240708133640.0
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100 1 _ |a Klein, S.
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245 _ _ |a Structural properties of microcrystalline SiC deposited at low substrate temperatures by HWCVD
260 _ _ |c 2005
295 1 0 |a 21st International Conference on Amorphous and Nanocrystalline Semiconductors (ICANS21)
336 7 _ |a Conference Presentation
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336 7 _ |a Conference Paper
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500 _ _ |a Record converted from VDB: 12.11.2012
500 _ _ |3 Presentation on a conference
536 _ _ |a Photovoltaik
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700 1 _ |a Houben, L.
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700 1 _ |a Carius, R.
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700 1 _ |a Finger, F.
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700 1 _ |a Fischer, E. V.
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Marc 21