%0 Conference Paper
%A Klein, S.
%A Dasgupta, A.
%A Finger, F.
%A Carius, R.
%A Bronger, T.
%T Electronic properties of low temperature microcrystalline silicon carbide prepared by Hot Wire CVD
%M PreJuSER-55231
%D 2006
%Z Record converted from VDB: 12.11.2012
%< 4th International Conference on Hot-Wire CVD (Cat-CVD) Process, October 3.-8.2006, Takayama, Japan : Extended Abstracts. - 2006. - S. 57 - 59
%F PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
%9 Contribution to a conference proceedingsContribution to a book
%U https://juser.fz-juelich.de/record/55231