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000055231 245__ $$aElectronic properties of low temperature microcrystalline silicon carbide prepared by Hot Wire CVD
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000055231 29510 $$a4th International Conference on Hot-Wire CVD (Cat-CVD) Process, October 3.-8.2006, Takayama, Japan : Extended Abstracts. - 2006. - S. 57 - 59
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