000055412 001__ 55412
000055412 005__ 20240708133731.0
000055412 0247_ $$2DOI$$a10.1016/j.apsusc.2006.05.069
000055412 0247_ $$2WOS$$aWOS:000242317500008
000055412 037__ $$aPreJuSER-55412
000055412 041__ $$aeng
000055412 082__ $$a670
000055412 084__ $$2WoS$$aChemistry, Physical
000055412 084__ $$2WoS$$aMaterials Science, Coatings & Films
000055412 084__ $$2WoS$$aPhysics, Applied
000055412 084__ $$2WoS$$aPhysics, Condensed Matter
000055412 1001_ $$0P:(DE-HGF)0$$aChen, C.$$b0
000055412 245__ $$aThe ultimate in real-time ellipsometry: Multichannel Mueller Matrix spectroscopy
000055412 260__ $$aAmsterdam$$bNorth-Holland$$c2006
000055412 300__ $$a38 - 46
000055412 3367_ $$0PUB:(DE-HGF)16$$2PUB:(DE-HGF)$$aJournal Article
000055412 3367_ $$2DataCite$$aOutput Types/Journal article
000055412 3367_ $$00$$2EndNote$$aJournal Article
000055412 3367_ $$2BibTeX$$aARTICLE
000055412 3367_ $$2ORCID$$aJOURNAL_ARTICLE
000055412 3367_ $$2DRIVER$$aarticle
000055412 440_0 $$0573$$aApplied Surface Science$$v253$$x0169-4332
000055412 500__ $$aRecord converted from VDB: 12.11.2012
000055412 520__ $$aA review of the techniques and applications of multichannel ellipsometry in the dual-rotating-compensator configuration is given. This ellipsometric approach has been established as the ultimate in real-time, single-spot optical measurement, as it determines the entire 16-element Mueller matrix of a sample over a wide spectral range (up to 1.7-5.3 eV) from raw data collected over a single optical period of 0.25 s. The sequence of optical elements for this ellipsometer is denoted PC(1r)SC(2r)A, where P, S, and A represent the polarizer, sample, and analyzer. C-1r and C-2r represent two MgF2 rotating compensators, either biplates or monoplates that rotate synchronously at frequencies of omega(1) = 5(omega) and omega(2) = 3 omega, where pi/omega is the fundamental optical perioid. Previous high-speed Mueller matrix measurements with this instrument have been performed on uniform, weakly anisotropic samples such as (110) Si, in which case one can extract the bulk isotropic and near-surface anisotropic optical responses simultaneously. In such an application, the instrument is operated at its precision/accuracy limits. Here, ex situ results on a strongly anisotropic, locally biaxial film are presented that demonstrate instrument capabilities for real-time analysis of such films during fabrication or modification. In addition, the use of the instrument as a real-time probe to extract surface roughness evolution on three different in-plane scales for an isotropic film surface is demonstrated for the first time. (c) 2006 Elsevier B.V. All rights reserved.
000055412 536__ $$0G:(DE-Juel1)FUEK401$$2G:(DE-HGF)$$aErneuerbare Energien$$cP11$$x0
000055412 588__ $$aDataset connected to Web of Science
000055412 650_7 $$2WoSType$$aJ
000055412 65320 $$2Author$$amultichannel Mueller matrix ellipsometry
000055412 65320 $$2Author$$adual-rotating-compensator ellipsometer
000055412 65320 $$2Author$$aellipsometry data analysis
000055412 65320 $$2Author$$aoptical anisotropy
000055412 65320 $$2Author$$asurface roughness evolution
000055412 7001_ $$0P:(DE-HGF)0$$aHorn, M. W.$$b1
000055412 7001_ $$0P:(DE-HGF)0$$aPursel, S.$$b2
000055412 7001_ $$0P:(DE-Juel1)VDB54102$$aRoß, C.$$b3$$uFZJ
000055412 7001_ $$0P:(DE-HGF)0$$aCollins, R. W.$$b4
000055412 773__ $$0PERI:(DE-600)2002520-8$$a10.1016/j.apsusc.2006.05.069$$gVol. 253, p. 38 - 46$$p38 - 46$$q253<38 - 46$$tApplied surface science$$v253$$x0169-4332$$y2006
000055412 8567_ $$uhttp://dx.doi.org/10.1016/j.apsusc.2006.05.069
000055412 909CO $$ooai:juser.fz-juelich.de:55412$$pVDB
000055412 9131_ $$0G:(DE-Juel1)FUEK401$$bEnergie$$kP11$$lErneuerbare Energien$$vErneuerbare Energien$$x0
000055412 9141_ $$y2006
000055412 915__ $$0StatID:(DE-HGF)0010$$aJCR/ISI refereed
000055412 9201_ $$0I:(DE-Juel1)VDB46$$d31.12.2006$$gIPV$$kIPV$$lInstitut für Photovoltaik$$x0
000055412 970__ $$aVDB:(DE-Juel1)86426
000055412 980__ $$aVDB
000055412 980__ $$aConvertedRecord
000055412 980__ $$ajournal
000055412 980__ $$aI:(DE-Juel1)IEK-5-20101013
000055412 980__ $$aUNRESTRICTED
000055412 981__ $$aI:(DE-Juel1)IMD-3-20101013
000055412 981__ $$aI:(DE-Juel1)IEK-5-20101013