Journal Article

PreJuSER-55412

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png The ultimate in real-time ellipsometry: Multichannel Mueller Matrix spectroscopy

Chen, C. ; Horn, M. W. ; Pursel, S. ; Roß, C.FZJ* ; Collins, R. W.

2006
North-Holland Amsterdam

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Please use a persistent id in citations: doi:10.1016/j.apsusc.2006.05.069

Abstract: A review of the techniques and applications of multichannel ellipsometry in the dual-rotating-compensator configuration is given. This ellipsometric approach has been established as the ultimate in real-time, single-spot optical measurement, as it determines the entire 16-element Mueller matrix of a sample over a wide spectral range (up to 1.7-5.3 eV) from raw data collected over a single optical period of 0.25 s. The sequence of optical elements for this ellipsometer is denoted PC(1r)SC(2r)A, where P, S, and A represent the polarizer, sample, and analyzer. C-1r and C-2r represent two MgF2 rotating compensators, either biplates or monoplates that rotate synchronously at frequencies of omega(1) = 5(omega) and omega(2) = 3 omega, where pi/omega is the fundamental optical perioid. Previous high-speed Mueller matrix measurements with this instrument have been performed on uniform, weakly anisotropic samples such as (110) Si, in which case one can extract the bulk isotropic and near-surface anisotropic optical responses simultaneously. In such an application, the instrument is operated at its precision/accuracy limits. Here, ex situ results on a strongly anisotropic, locally biaxial film are presented that demonstrate instrument capabilities for real-time analysis of such films during fabrication or modification. In addition, the use of the instrument as a real-time probe to extract surface roughness evolution on three different in-plane scales for an isotropic film surface is demonstrated for the first time. (c) 2006 Elsevier B.V. All rights reserved.

Keyword(s): J ; multichannel Mueller matrix ellipsometry (auto) ; dual-rotating-compensator ellipsometer (auto) ; ellipsometry data analysis (auto) ; optical anisotropy (auto) ; surface roughness evolution (auto)

Note: Record converted from VDB: 12.11.2012

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Contributing Institute(s):

1. Institut für Photovoltaik (IPV)

Research Program(s):

1. Erneuerbare Energien (P11)

Appears in the scientific report 2006

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