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@ARTICLE{Chen:55412,
      author       = {Chen, C. and Horn, M. W. and Pursel, S. and Roß, C. and
                      Collins, R. W.},
      title        = {{T}he ultimate in real-time ellipsometry: {M}ultichannel
                      {M}ueller {M}atrix spectroscopy},
      journal      = {Applied surface science},
      volume       = {253},
      issn         = {0169-4332},
      address      = {Amsterdam},
      publisher    = {North-Holland},
      reportid     = {PreJuSER-55412},
      pages        = {38 - 46},
      year         = {2006},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {A review of the techniques and applications of multichannel
                      ellipsometry in the dual-rotating-compensator configuration
                      is given. This ellipsometric approach has been established
                      as the ultimate in real-time, single-spot optical
                      measurement, as it determines the entire 16-element Mueller
                      matrix of a sample over a wide spectral range (up to 1.7-5.3
                      eV) from raw data collected over a single optical period of
                      0.25 s. The sequence of optical elements for this
                      ellipsometer is denoted PC(1r)SC(2r)A, where P, S, and A
                      represent the polarizer, sample, and analyzer. C-1r and C-2r
                      represent two MgF2 rotating compensators, either biplates or
                      monoplates that rotate synchronously at frequencies of
                      omega(1) = 5(omega) and omega(2) = 3 omega, where pi/omega
                      is the fundamental optical perioid. Previous high-speed
                      Mueller matrix measurements with this instrument have been
                      performed on uniform, weakly anisotropic samples such as
                      (110) Si, in which case one can extract the bulk isotropic
                      and near-surface anisotropic optical responses
                      simultaneously. In such an application, the instrument is
                      operated at its precision/accuracy limits. Here, ex situ
                      results on a strongly anisotropic, locally biaxial film are
                      presented that demonstrate instrument capabilities for
                      real-time analysis of such films during fabrication or
                      modification. In addition, the use of the instrument as a
                      real-time probe to extract surface roughness evolution on
                      three different in-plane scales for an isotropic film
                      surface is demonstrated for the first time. (c) 2006
                      Elsevier B.V. All rights reserved.},
      keywords     = {J (WoSType)},
      cin          = {IPV},
      ddc          = {670},
      cid          = {I:(DE-Juel1)VDB46},
      pnm          = {Erneuerbare Energien},
      pid          = {G:(DE-Juel1)FUEK401},
      shelfmark    = {Chemistry, Physical / Materials Science, Coatings $\&$
                      Films / Physics, Applied / Physics, Condensed Matter},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000242317500008},
      doi          = {10.1016/j.apsusc.2006.05.069},
      url          = {https://juser.fz-juelich.de/record/55412},
}