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001     55412
005     20240708133731.0
024 7 _ |2 DOI
|a 10.1016/j.apsusc.2006.05.069
024 7 _ |2 WOS
|a WOS:000242317500008
037 _ _ |a PreJuSER-55412
041 _ _ |a eng
082 _ _ |a 670
084 _ _ |2 WoS
|a Chemistry, Physical
084 _ _ |2 WoS
|a Materials Science, Coatings & Films
084 _ _ |2 WoS
|a Physics, Applied
084 _ _ |2 WoS
|a Physics, Condensed Matter
100 1 _ |a Chen, C.
|b 0
|0 P:(DE-HGF)0
245 _ _ |a The ultimate in real-time ellipsometry: Multichannel Mueller Matrix spectroscopy
260 _ _ |a Amsterdam
|b North-Holland
|c 2006
300 _ _ |a 38 - 46
336 7 _ |a Journal Article
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336 7 _ |a Output Types/Journal article
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336 7 _ |a Journal Article
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336 7 _ |a ARTICLE
|2 BibTeX
336 7 _ |a JOURNAL_ARTICLE
|2 ORCID
336 7 _ |a article
|2 DRIVER
440 _ 0 |a Applied Surface Science
|x 0169-4332
|0 573
|v 253
500 _ _ |a Record converted from VDB: 12.11.2012
520 _ _ |a A review of the techniques and applications of multichannel ellipsometry in the dual-rotating-compensator configuration is given. This ellipsometric approach has been established as the ultimate in real-time, single-spot optical measurement, as it determines the entire 16-element Mueller matrix of a sample over a wide spectral range (up to 1.7-5.3 eV) from raw data collected over a single optical period of 0.25 s. The sequence of optical elements for this ellipsometer is denoted PC(1r)SC(2r)A, where P, S, and A represent the polarizer, sample, and analyzer. C-1r and C-2r represent two MgF2 rotating compensators, either biplates or monoplates that rotate synchronously at frequencies of omega(1) = 5(omega) and omega(2) = 3 omega, where pi/omega is the fundamental optical perioid. Previous high-speed Mueller matrix measurements with this instrument have been performed on uniform, weakly anisotropic samples such as (110) Si, in which case one can extract the bulk isotropic and near-surface anisotropic optical responses simultaneously. In such an application, the instrument is operated at its precision/accuracy limits. Here, ex situ results on a strongly anisotropic, locally biaxial film are presented that demonstrate instrument capabilities for real-time analysis of such films during fabrication or modification. In addition, the use of the instrument as a real-time probe to extract surface roughness evolution on three different in-plane scales for an isotropic film surface is demonstrated for the first time. (c) 2006 Elsevier B.V. All rights reserved.
536 _ _ |a Erneuerbare Energien
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588 _ _ |a Dataset connected to Web of Science
650 _ 7 |a J
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653 2 0 |2 Author
|a multichannel Mueller matrix ellipsometry
653 2 0 |2 Author
|a dual-rotating-compensator ellipsometer
653 2 0 |2 Author
|a ellipsometry data analysis
653 2 0 |2 Author
|a optical anisotropy
653 2 0 |2 Author
|a surface roughness evolution
700 1 _ |a Horn, M. W.
|b 1
|0 P:(DE-HGF)0
700 1 _ |a Pursel, S.
|b 2
|0 P:(DE-HGF)0
700 1 _ |a Roß, C.
|b 3
|u FZJ
|0 P:(DE-Juel1)VDB54102
700 1 _ |a Collins, R. W.
|b 4
|0 P:(DE-HGF)0
773 _ _ |a 10.1016/j.apsusc.2006.05.069
|g Vol. 253, p. 38 - 46
|p 38 - 46
|q 253<38 - 46
|0 PERI:(DE-600)2002520-8
|t Applied surface science
|v 253
|y 2006
|x 0169-4332
856 7 _ |u http://dx.doi.org/10.1016/j.apsusc.2006.05.069
909 C O |o oai:juser.fz-juelich.de:55412
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914 1 _ |y 2006
915 _ _ |0 StatID:(DE-HGF)0010
|a JCR/ISI refereed
920 1 _ |k IPV
|l Institut für Photovoltaik
|d 31.12.2006
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