%0 Journal Article
%A Dippel, A. C.
%A Schneller, T.
%A Gerber, P.
%A Waser, R.
%T Morphology control of highly-transparent indium tin oxide thin films prepared by a chlorine-reduced metallo-organic decomposition technique
%J Thin solid films
%V 515
%@ 0040-6090
%C Amsterdam [u.a.]
%I Elsevier
%M PreJuSER-58041
%D 2007
%Z Record converted from VDB: 12.11.2012
%X Indium tin oxide thin films were prepared by a chemical solution deposition route based on a one pot reaction of indium acetate, tin tetrachloride pentahydrate and propionic acid. The films were heat-treated in oxidising atmosphere and post-annealed in forming gas containing 10% hydrogen. It was found that the coating solution concentration exerted a major influence on the morphology of the films. Low-concentrated solutions yielded layers with columnar structure while higher molarities led to fine-grained granular films. Under optimised conditions, thin films of indium tin oxide exhibiting a resistivity of 1(.)10(-3) Omega cm were obtained. The transparency was determined to a high level of above 90% in the entire visible range of the spectrum. (c) 2006 Elsevier B.V. All rights reserved.
%K J (WoSType)
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000244825100078
%R 10.1016/j.tsf.2006.09.045
%U https://juser.fz-juelich.de/record/58041