Home > Publications database > Morphology control of highly-transparent indium tin oxide thin films prepared by a chlorine-reduced metallo-organic decomposition technique |
Journal Article | PreJuSER-58041 |
; ; ;
2007
Elsevier
Amsterdam [u.a.]
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Please use a persistent id in citations: doi:10.1016/j.tsf.2006.09.045
Abstract: Indium tin oxide thin films were prepared by a chemical solution deposition route based on a one pot reaction of indium acetate, tin tetrachloride pentahydrate and propionic acid. The films were heat-treated in oxidising atmosphere and post-annealed in forming gas containing 10% hydrogen. It was found that the coating solution concentration exerted a major influence on the morphology of the films. Low-concentrated solutions yielded layers with columnar structure while higher molarities led to fine-grained granular films. Under optimised conditions, thin films of indium tin oxide exhibiting a resistivity of 1(.)10(-3) Omega cm were obtained. The transparency was determined to a high level of above 90% in the entire visible range of the spectrum. (c) 2006 Elsevier B.V. All rights reserved.
Keyword(s): J ; indium tin oxide (auto) ; chemical solution deposition (auto) ; morphology evolution (auto) ; transparent conductive oxide (auto)
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