Journal Article PreJuSER-58041

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Morphology control of highly-transparent indium tin oxide thin films prepared by a chlorine-reduced metallo-organic decomposition technique

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2007
Elsevier Amsterdam [u.a.]

Thin solid films 515, () [10.1016/j.tsf.2006.09.045]

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Abstract: Indium tin oxide thin films were prepared by a chemical solution deposition route based on a one pot reaction of indium acetate, tin tetrachloride pentahydrate and propionic acid. The films were heat-treated in oxidising atmosphere and post-annealed in forming gas containing 10% hydrogen. It was found that the coating solution concentration exerted a major influence on the morphology of the films. Low-concentrated solutions yielded layers with columnar structure while higher molarities led to fine-grained granular films. Under optimised conditions, thin films of indium tin oxide exhibiting a resistivity of 1(.)10(-3) Omega cm were obtained. The transparency was determined to a high level of above 90% in the entire visible range of the spectrum. (c) 2006 Elsevier B.V. All rights reserved.

Keyword(s): J ; indium tin oxide (auto) ; chemical solution deposition (auto) ; morphology evolution (auto) ; transparent conductive oxide (auto)


Note: Record converted from VDB: 12.11.2012

Contributing Institute(s):
  1. Elektronische Materialien (IFF-6)
  2. Center of Nanoelectronic Systems for Information Technology (CNI)
  3. Jülich-Aachen Research Alliance - Fundamentals of Future Information Technology (JARA-FIT)
Research Program(s):
  1. Grundlagen für zukünftige Informationstechnologien (P42)
  2. Kondensierte Materie (P54)

Appears in the scientific report 2007
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JARA > JARA > JARA-JARA\-FIT
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 Record created 2012-11-13, last modified 2018-02-11



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