TY  - JOUR
AU  - Dippel, A. C.
AU  - Schneller, T.
AU  - Gerber, P.
AU  - Waser, R.
TI  - Morphology control of highly-transparent indium tin oxide thin films prepared by a chlorine-reduced metallo-organic decomposition technique
JO  - Thin solid films
VL  - 515
SN  - 0040-6090
CY  - Amsterdam [u.a.]
PB  - Elsevier
M1  - PreJuSER-58041
PY  - 2007
N1  - Record converted from VDB: 12.11.2012
AB  - Indium tin oxide thin films were prepared by a chemical solution deposition route based on a one pot reaction of indium acetate, tin tetrachloride pentahydrate and propionic acid. The films were heat-treated in oxidising atmosphere and post-annealed in forming gas containing 10% hydrogen. It was found that the coating solution concentration exerted a major influence on the morphology of the films. Low-concentrated solutions yielded layers with columnar structure while higher molarities led to fine-grained granular films. Under optimised conditions, thin films of indium tin oxide exhibiting a resistivity of 1(.)10(-3) Omega cm were obtained. The transparency was determined to a high level of above 90% in the entire visible range of the spectrum. (c) 2006 Elsevier B.V. All rights reserved.
KW  - J (WoSType)
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000244825100078
DO  - DOI:10.1016/j.tsf.2006.09.045
UR  - https://juser.fz-juelich.de/record/58041
ER  -