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@ARTICLE{Dippel:58041,
author = {Dippel, A. C. and Schneller, T. and Gerber, P. and Waser,
R.},
title = {{M}orphology control of highly-transparent indium tin oxide
thin films prepared by a chlorine-reduced metallo-organic
decomposition technique},
journal = {Thin solid films},
volume = {515},
issn = {0040-6090},
address = {Amsterdam [u.a.]},
publisher = {Elsevier},
reportid = {PreJuSER-58041},
year = {2007},
note = {Record converted from VDB: 12.11.2012},
abstract = {Indium tin oxide thin films were prepared by a chemical
solution deposition route based on a one pot reaction of
indium acetate, tin tetrachloride pentahydrate and propionic
acid. The films were heat-treated in oxidising atmosphere
and post-annealed in forming gas containing $10\%$ hydrogen.
It was found that the coating solution concentration exerted
a major influence on the morphology of the films.
Low-concentrated solutions yielded layers with columnar
structure while higher molarities led to fine-grained
granular films. Under optimised conditions, thin films of
indium tin oxide exhibiting a resistivity of 1(.)10(-3)
Omega cm were obtained. The transparency was determined to a
high level of above $90\%$ in the entire visible range of
the spectrum. (c) 2006 Elsevier B.V. All rights reserved.},
keywords = {J (WoSType)},
cin = {IFF-6 / CNI / JARA-FIT},
ddc = {070},
cid = {I:(DE-Juel1)VDB786 / I:(DE-Juel1)VDB381 /
$I:(DE-82)080009_20140620$},
pnm = {Grundlagen für zukünftige Informationstechnologien /
Kondensierte Materie},
pid = {G:(DE-Juel1)FUEK412 / G:(DE-Juel1)FUEK414},
shelfmark = {Materials Science, Multidisciplinary / Materials Science,
Coatings $\&$ Films / Physics, Applied / Physics, Condensed
Matter},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000244825100078},
doi = {10.1016/j.tsf.2006.09.045},
url = {https://juser.fz-juelich.de/record/58041},
}