TY  - JOUR
AU  - Yang, Z.
AU  - Lichtenwalner, D.
AU  - Morris, A.
AU  - Menzel, S.
AU  - Nauenheim, C.
AU  - Gruverman, A.
AU  - Krim, J.
AU  - Kingon, A.
TI  - A new test facility for efficient evaluation of MEMS contact materials
JO  - Journal of micromechanics and microengineering
VL  - 17
SN  - 0960-1317
CY  - Bristol
PB  - Inst.
M1  - PreJuSER-58275
SP  - 1788
PY  - 2007
N1  - Record converted from VDB: 12.11.2012
AB  - A novel test facility for the efficient evaluation of microelectromechanical system ( MEMS) switches and the development of alternative contact materials is described. The facility utilizes the upper cantilever from commercial MEMS contact switches, and tests these against alternative bottom contact materials within a modified atomic force microscope ( AFM). The test closely approximates the real switch, but can accommodate a wider range of test conditions and contact materials. The facility allows alternative contact materials to be easily and quickly incorporated, and therefore evaluated by measuring the number of cycles to failure. The evolution of the wear surfaces of the switch contact materials under test can also be easily examined. In order to demonstrate the facility, the evolution of the contact resistance and wear of a commercial RF MEMS cantilever with Au contacts was monitored under accelerated test conditions, comparing the behavior of Au bottom contacts to an alternative Au-Ni alloy contact material. The Au-Ni( 20 at.%) alloy displayed reduced wear rates and improved switch cycle lifetimes compared to pure Au, while retaining acceptable values of contact resistance.
KW  - J (WoSType)
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000249222400017
DO  - DOI:10.1088/0960-1317/17/9/006
UR  - https://juser.fz-juelich.de/record/58275
ER  -