Journal Article

PreJuSER-58275

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png A new test facility for efficient evaluation of MEMS contact materials

Yang, Z. ; Lichtenwalner, D. ; Morris, A. ; Menzel, S. ; Nauenheim, C.FZJ* ; Gruverman, A. ; Krim, J. ; Kingon, A.

2007
Inst. Bristol

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Please use a persistent id in citations: doi:10.1088/0960-1317/17/9/006

Abstract: A novel test facility for the efficient evaluation of microelectromechanical system ( MEMS) switches and the development of alternative contact materials is described. The facility utilizes the upper cantilever from commercial MEMS contact switches, and tests these against alternative bottom contact materials within a modified atomic force microscope ( AFM). The test closely approximates the real switch, but can accommodate a wider range of test conditions and contact materials. The facility allows alternative contact materials to be easily and quickly incorporated, and therefore evaluated by measuring the number of cycles to failure. The evolution of the wear surfaces of the switch contact materials under test can also be easily examined. In order to demonstrate the facility, the evolution of the contact resistance and wear of a commercial RF MEMS cantilever with Au contacts was monitored under accelerated test conditions, comparing the behavior of Au bottom contacts to an alternative Au-Ni alloy contact material. The Au-Ni( 20 at.%) alloy displayed reduced wear rates and improved switch cycle lifetimes compared to pure Au, while retaining acceptable values of contact resistance.

Keyword(s): J

Note: Record converted from VDB: 12.11.2012

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Contributing Institute(s):

1. Elektronische Materialien (IFF-6)
2. Center of Nanoelectronic Systems for Information Technology (CNI)

Research Program(s):

1. Grundlagen für zukünftige Informationstechnologien (P42)

Appears in the scientific report 2007

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