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@ARTICLE{Yang:58275,
      author       = {Yang, Z. and Lichtenwalner, D. and Morris, A. and Menzel,
                      S. and Nauenheim, C. and Gruverman, A. and Krim, J. and
                      Kingon, A.},
      title        = {{A} new test facility for efficient evaluation of {MEMS}
                      contact materials},
      journal      = {Journal of micromechanics and microengineering},
      volume       = {17},
      issn         = {0960-1317},
      address      = {Bristol},
      publisher    = {Inst.},
      reportid     = {PreJuSER-58275},
      pages        = {1788},
      year         = {2007},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {A novel test facility for the efficient evaluation of
                      microelectromechanical system ( MEMS) switches and the
                      development of alternative contact materials is described.
                      The facility utilizes the upper cantilever from commercial
                      MEMS contact switches, and tests these against alternative
                      bottom contact materials within a modified atomic force
                      microscope ( AFM). The test closely approximates the real
                      switch, but can accommodate a wider range of test conditions
                      and contact materials. The facility allows alternative
                      contact materials to be easily and quickly incorporated, and
                      therefore evaluated by measuring the number of cycles to
                      failure. The evolution of the wear surfaces of the switch
                      contact materials under test can also be easily examined. In
                      order to demonstrate the facility, the evolution of the
                      contact resistance and wear of a commercial RF MEMS
                      cantilever with Au contacts was monitored under accelerated
                      test conditions, comparing the behavior of Au bottom
                      contacts to an alternative Au-Ni alloy contact material. The
                      Au-Ni( 20 $at.\%)$ alloy displayed reduced wear rates and
                      improved switch cycle lifetimes compared to pure Au, while
                      retaining acceptable values of contact resistance.},
      keywords     = {J (WoSType)},
      cin          = {IFF-6 / CNI},
      ddc          = {530},
      cid          = {I:(DE-Juel1)VDB786 / I:(DE-Juel1)VDB381},
      pnm          = {Grundlagen für zukünftige Informationstechnologien},
      pid          = {G:(DE-Juel1)FUEK412},
      shelfmark    = {Engineering, Electrical $\&$ Electronic / Nanoscience $\&$
                      Nanotechnology / Instruments $\&$ Instrumentation /
                      Materials Science, Multidisciplinary / Mechanics},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000249222400017},
      doi          = {10.1088/0960-1317/17/9/006},
      url          = {https://juser.fz-juelich.de/record/58275},
}