%0 Conference Paper
%A Saleh, R.
%A Munisa, L.
%A Beyer, W.
%T Microstructure characterization of amorphous silicon carbon (a-Si:C:H) films by hydrogen effusion and diffusion measurements
%M PreJuSER-60113
%D 2000
%Z Record converted from VDB: 12.11.2012
%< International Symposium on the Science on Surfaces and Nanostructures (ISSSN)
Y2 22 Nov 2000
M2 Singapore, 
%F PUB:(DE-HGF)24
%9 Poster
%U https://juser.fz-juelich.de/record/60113