TY  - CONF
AU  - Saleh, R.
AU  - Munisa, L.
AU  - Beyer, W.
TI  - Microstructure characterization of amorphous silicon carbon (a-Si:C:H) films by hydrogen effusion and diffusion measurements
M1  - PreJuSER-60113
PY  - 2000
N1  - Record converted from VDB: 12.11.2012
Y2  - 22 Nov 2000
M2  - Singapore, 
LB  - PUB:(DE-HGF)24
UR  - https://juser.fz-juelich.de/record/60113
ER  -