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@ARTICLE{Kgeler:6199,
      author       = {Kügeler, C. and Böttger, U. and Schneller, T.},
      title        = {{E}lectromechanical properties of lanthanum-doped lead
                      hafnate titanate thin films for integrated piezoelectric
                      {MEMS} applications},
      journal      = {Applied physics / A},
      volume       = {94},
      issn         = {0947-8396},
      address      = {Berlin},
      publisher    = {Springer},
      reportid     = {PreJuSER-6199},
      pages        = {739 - 743},
      year         = {2009},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {This paper focuses on the deposition and electromechanical
                      characterization of lanthanum-doped lead hafnate titanate
                      (PLHT) thin films as key material in piezoelectric
                      microelectromechanical systems (pMEMS). PLHT (x/30/70) and
                      PLHT(x/45/55) films with a thickness between 150 nm and 250
                      nm were deposited by chemical solution deposition (CSD).
                      Thereby x varies between 0 and $10\%$ La content. The
                      electrical characterization shows that undoped (x=0) PLHT
                      exhibit ferroelectric behavior similar to PZT of the same
                      composition. La doping results in reduced ferroelectric
                      properties and also affects the electromechanical
                      properties. Measurements using a double beam laser
                      interferometer yield a piezoelectric coefficient d (33) of
                      60 pm/V, which stays constant with an increasing electric
                      field. This leads to a linear displacement compared to
                      undoped PLHT or conventional PZT films used for MEMS
                      applications.},
      keywords     = {J (WoSType)},
      cin          = {IFF-6 / JARA-FIT},
      ddc          = {530},
      cid          = {I:(DE-Juel1)VDB786 / $I:(DE-82)080009_20140620$},
      pnm          = {Grundlagen für zukünftige Informationstechnologien},
      pid          = {G:(DE-Juel1)FUEK412},
      shelfmark    = {Materials Science, Multidisciplinary / Physics, Applied},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000263069700005},
      doi          = {10.1007/s00339-008-5045-6},
      url          = {https://juser.fz-juelich.de/record/6199},
}