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@ARTICLE{Meier:62881,
author = {Meier, M. and Nauenheim, C. and Gilles, S. and Mayer, D.
and Kügeler, C. and Waser, R.},
title = {{N}anoimprint for future non-volatile memory and logic
devices},
journal = {Microelectronic engineering},
volume = {85},
issn = {0167-9317},
address = {[S.l.] @},
publisher = {Elsevier},
reportid = {PreJuSER-62881},
pages = {870 - 872},
year = {2008},
note = {Record converted from VDB: 12.11.2012},
abstract = {Nanoimprint lithography (NIL) is used to realize next
generation memory and logic devices. The simple device
structure consists of a resistance switching material
sandwiched between two metal nanoelectrodes. Bottom and top
electrodes are aligned perpendicular to each other building
a crossbar array structure. A significant advantage of these
future devices in addition to its simplicity is the high
integration density. Crossbar arrays with 200 nm electrodes
and single cross junctions with 30 nm electrodes were
achieved using UV NIL. The bottom electrodes were embedded
and planarized by spin on glass, such that an even surface
for the realization of the top electrodes by UV NIL could be
obtained. Finally electrical measurements demonstrated the
function of the fabricated devices. (c) 2008 Elsevier B.V.
All rights reserved.},
keywords = {J (WoSType)},
cin = {IBN-2 / IFF-6 / JARA-FIT},
ddc = {620},
cid = {I:(DE-Juel1)IBN-2-20090406 / I:(DE-Juel1)VDB786 /
$I:(DE-82)080009_20140620$},
pnm = {Grundlagen für zukünftige Informationstechnologien},
pid = {G:(DE-Juel1)FUEK412},
shelfmark = {Engineering, Electrical $\&$ Electronic / Nanoscience $\&$
Nanotechnology / Optics / Physics, Applied},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000257413400034},
doi = {10.1016/j.mee.2008.01.101},
url = {https://juser.fz-juelich.de/record/62881},
}