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@ARTICLE{Smirnov:809697,
      author       = {Smirnov, V. and Lambertz, Andreas and Moll, Sandra and
                      Bär, M. and Starr, D. E. and Wilks, R. G. and Gorgoi, M.
                      and Heidt, Anna and Luysberg, Martina and Holländer,
                      Bernhard and Finger, Friedhelm},
      title        = {{D}oped microcrystalline silicon oxide alloys for
                      silicon-based photovoltaics: {O}ptoelectronic properties,
                      chemical composition, and structure studied by advanced
                      characterization techniques},
      journal      = {Physica status solidi / A},
      volume       = {213},
      number       = {7},
      issn         = {1862-6300},
      address      = {Weinheim},
      publisher    = {Wiley-VCH},
      reportid     = {FZJ-2016-02626},
      pages        = {1814 - 1820},
      year         = {2016},
      abstract     = {Doped microcrystalline silicon oxide (μc-SiOx:H) alloys
                      attract significant attention as a functional material in
                      photovoltaic devices. By using various advanced
                      characterization methods, we have studied the relationship
                      between optoelectronic properties, chemical composition, and
                      structure of p-type µc-SiOx:H deposited by plasma enhanced
                      chemical vapor deposition (PECVD). For a wide range of
                      compositions with varying oxygen content, we show that the
                      dominant components are Si and a-SiO2, while the fraction of
                      suboxides is minor. The μc-SiOx:H material with sufficient
                      oxygen content (x = 0.35) exhibits an enlarged optical
                      gap E04 > 2.2 eV and sufficiently high dark
                      conductivity >10−6 S cm−1; the crystalline silicon
                      fraction has a filament-like shape (with a typical width of
                      around 10 nm) forming a branch-like structure elongated in
                      the growth direction over several hundreds of nanometers},
      cin          = {IEK-5},
      ddc          = {530},
      cid          = {I:(DE-Juel1)IEK-5-20101013},
      pnm          = {121 - Solar cells of the next generation (POF3-121)},
      pid          = {G:(DE-HGF)POF3-121},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000385222900024},
      doi          = {10.1002/pssa.201533022},
      url          = {https://juser.fz-juelich.de/record/809697},
}